Circuit Modeling of a MEMS Varactor Including Dielectric Charging Dynamics
نویسندگان
چکیده
Electrical models for MEMS varactors including the e ect of dielectric charging dynamics are not available in commercial circuit simulators. In this paper a circuit model using lumped ideal elements available in the Cadence libraries, and a basic Verilog-A model, has been implemented. The model has been used to simulate the dielectric charging in function of time and its e ects over the MEMS capacitance value.
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